Micro-electromechanical device and its manufacturing method and technical realization elements

Technical implementation elements:

4. In view of the above problems, the present invention is proposed. The present invention provides a novel mems device structure, which can avoid the use of cantilever beams, has higher durability, and has a simpler structure. The present invention also provides a novel manufacturing method of the mems device, which has simple process steps and can improve the manufacturing yield.

5. According to an exemplary embodiment, a microelectromechanical device may comprise: an insulating substrate; a support post disposed on the substrate, the support post supporting a proof mass; surrounding the substrate on the substrate One or more pairs of electrode plates arranged on the mass block, each pair of electrode plates is arranged on opposite sides of the mass block; and an insulating cover plate, on which a pair of electrode plates corresponding to the one or more pairs of electrode plates is arranged or multiple pairs of electrodes, when the cover plate covers the one or more pairs of electrode plates, the one or more pairs of electrodes are respectively in electrical contact with the one or more pairs of electrode plates.

6. In some embodiments, the support post, the proof-mass, and the one or more pairs of electrode plates are formed of a conductor or semiconductor material, and conductive leads connected to the support post are connected from one side of the substrate. Lead out, the conductive leads connected to the one or more pairs of electrodes are led out from one side of the cover plate.

7. In some embodiments, the cover plate is formed with an opening between the one or more pairs of electrodes to expose the support post and the proof-mass.

8. In some embodiments, the height of the proof-mass is lower than the height of the one or more pairs of electrode plates.

9. In some embodiments, the microelectromechanical device is used as an accelerometer and the one or more pairs of electrode plates are used to measure changes in capacitance due to changes in the position of the proof-mass.

10. In some embodiments, the microelectromechanical device is used as a gyroscope, and the one or more pairs of electrode plates include at least a first pair of electrode plates and a second pair of electrode plates, the first pair of electrode plates for A drive signal is applied to drive the proof-mass to oscillate between the first pair of electrode plates, and the second pair of electrode plates are used to measure changes in capacitance due to changes in the position of the proof-mass.

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