Method for producing a micromechanical component for a sensor device or a microphone device

Technical implementation elements:

3. The present invention proposes a micromechanical component for a sensor device or a microphone device with the features of claim 1, and a method for producing a micromechanical component for a sensor device or a microphone device with the features of claim 5 .

4. Invention Advantages

5. The construction according to the invention based on at least one sacrificial layer of at least one electrically insulating sacrificial layer material of the micromechanical component proposed by the invention and the same The configuration according to the invention of at least one insulating region made of at least one electrically insulating material of the insulating sacrificial layer material, in order to configure the cavity of the micromechanical component, a process suitable for the partial removal of the at least one sacrificial layer can be carried out without the need for Worry about damaging or removing at least one area of insulation. The invention thus makes it simple to equip the corresponding micromechanical component according to the invention with at least one insulating region which is advantageously suitable for electrically insulating the electrode structure from the membrane, between the membrane material layer and the electrode material layer. electrically insulating and/or separating at least one residual region of at least one sacrificial layer from the cavity. The invention thus improves the micromechanical component according to the invention compared to the prior art and additionally contributes to reducing the labor costs and the micromechanical component according to the invention for producing the micromechanical component according to the invention manufacturing cost.

6. The at least one insulating region for separating the at least one residual region of the at least one sacrificial layer may in particular act as an "etch protection" against undesired etching of the at least one residual region during construction of the cavity. At the same time, at least one insulating region constructed from at least one electrically insulating material for separating the at least one residual region is achieved.

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