Microelectromechanical device and method of making the same
Sep 16, 2022
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1. The present invention relates to a microelectromechanical device and a manufacturing method thereof.
Background technique:
2. Micro-electromechanical device (mems) is a technology developed comprehensively on the basis of microelectronics technology, semiconductor manufacturing technology and other disciplines, which integrates multiple technical fields such as lithography, corrosion, thin film deposition, micromachining and precision machining , realizing the miniaturization of precision devices to meet the needs of various applications. Common mems devices include accelerometers and gyroscopes.
3. The current mems accelerometers or gyroscopes mostly use two or more cantilever beam structures to support the mass block. The mass block can be displaced due to acceleration, or can be driven to oscillate, while measuring the capacitance change caused by the mass block. Acceleration and angular velocity can be measured. However, the manufacturing process of the cantilever beam is complicated, and the problem of stress imbalance among the cantilever beams is prone to occur.
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