The Technical Realization Elements Of Bone Conduction Sensor Chip.

Technical implementation elements:

3. In view of this, the embodiments of the present technology aim to provide a bone conduction sensor chip to solve the problem of unstable sensitivity of the bone conduction sensor chip in the prior art.

4. The present technology provides a bone conduction sensor chip, comprising: a vibrating membrane; a mass block located on one side of the vibrating membrane; and a stop structure for limiting the vibration amplitude of the mass block in a direction parallel to the vibrating membrane. The stop structure is used to limit the amplitude of the horizontal vibration of the mass block, thereby reducing the interference degree of the horizontal vibration to the vertical vibration, ensuring that the vertical vibration of the mass block is more stable, and further improving the sensitivity uniformity of the chip.

5. In one embodiment, the stopper structure comprises a coplanar first stopper layer and a second stopper layer, the first stopper layer is located between the movable area and the mass, and the second stopper layer and the fixed area superimposed; there is a first gap between the first stop layer and the second stop layer.

6. In one embodiment, the materials of the first stopper layer and the second stopper layer are both polysilicon.

7. In one embodiment, a sacrificial layer is also included, and the sacrificial layer includes a central area arranged at intervals and an edge area surrounding the central area; the central area is located between the movable area and the first stop layer, and the edge area is located between the fixed area and the edge area. Between the second stop layers; the central area and the edge area have a second interval, the second interval is greater than the first interval, and communicates with the first interval.

8. In one embodiment, it also includes a support structure; the support structure includes a first cavity, and the first cavity includes an opening; the mass block is located in the first cavity, the movable area of the vibrating membrane covers the opening, and the fixed area is connected to the support. Structural connection.

9. In one embodiment, the ratio of the first spacing to the length of the first cavity is greater than zero and less than or equal to 1/10 in a section passing through the centerline of the proof-mass.

10. In one embodiment, the stop structure includes a first cavity, the mass block is located in the first cavity, and the side wall of the mass block and the wall of the first cavity are spaced apart.

11. In one embodiment, the ratio of the minimum interval between the side wall of the mass and the wall of the first cavity to the length of the first cavity is greater than zero and less than or equal to 1/10.

12. In one embodiment, the proof-mass includes a body portion and at least one protrusion on a sidewall of the body portion.

13. In one embodiment, the proof-mass includes a second cavity.

14. In one embodiment, the first cavity includes an opening; the diaphragm includes a movable area and an edge area surrounding the movable area; the movable area covers the opening, and the fixed area is connected to the stop structure.

15. In one embodiment, it also includes a bottom plate on the side of the mass block away from the vibrating membrane; the stopper structure includes at least one protrusion arranged on the surface of the bottom plate close to the mass block, and the end of each protrusion is The surface passes through the mass; in a direction parallel to the diaphragm, there is a space between the sidewall of each protrusion and the sidewall of the mass.

16. In one embodiment, the raised material includes any one of silicon, silicon oxide, and glue.

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