Bone Conduction Sensor Chip Fabrication Method

1. The present technology relates to the technical field of micro-electro-mechanical system (mems) devices, in particular to a bone conduction sensor chip.

Background technique:

2. With the rapid development of mems technology, mems bone conduction sensor chip (hereinafter referred to as bone conduction sensor chip) came into being. A conventional bone conduction sensor chip usually includes a back plate and a vibrating membrane arranged oppositely, and a mass is suspended on the side of the vibrating membrane away from the back plate. The mass block feels the bone vibration generated by the vibration of the vocal cords and generates mechanical vibration. The mechanical vibration of the mass block drives the vibrating membrane to vibrate, thereby changing the distance between the back plate and the vibrating membrane, and then changing the capacitance signal, so as to realize the detection of the sound signal. . However, the sensitivity of the conventional bone conduction sensor chip is not very stable, which limits its application field.

Contact Us：

Email: zhang@pride-cnc.com

Tel: +86-755-23699351

Mob: +8618666663894