Method of making on-chip signal paths with electrical and physical connections
Sep 16, 2022
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Background technique:
1. Numerous items such as smartphones, smart watches, tablets, automobiles, aerial drones, appliances, aircraft, motion aids, and game controllers use sensors (for example, motion sensors) during their operation , pressure sensor, temperature sensor, etc.). In commercial applications, microelectromechanical (mems) devices or sensors, such as accelerometers and gyroscopes, capture complex movements and determine orientation or direction. For example, smartphones are equipped with accelerometers and gyroscopes to enhance navigation systems that rely on global positioning system (gps) information. In another example, the aircraft determines heading based on gyroscopic measurements (eg, roll, pitch, and yaw) and the vehicle implements assisted steering to improve safety (eg, to identify a skid or roll situation).
2. As more and more products incorporate mems technology for various applications, mems devices must be integrated with multiple form factors and in miniaturized devices. A mems device may generally include numerous components and systems, such as microelectromechanical components, analog and digital circuitry, and other associated processing circuitry for computing outputs based on signals associated with the microelectromechanical components. Furthermore, these components need to be protected from the external environment, packaged and interconnected with other components. The resulting mems device, while very small, still takes up valuable space within the end-use device.

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