A nanocomposite system and method for researching nanomaterials

1. The present invention relates to the field of research-level scientific research equipment in nanoscience, and in particular, to the field of a nanoscale integrated system and a method for researching nanomaterials.

Background technique:

2. Nanoscience is a science that studies the laws of physics within 100 nanometers, and its development is inseparable from the development and breakthroughs in the field of scientific research equipment. The types of commonly used nano-scientific research equipment include micro-nano processing equipment, such as lithography machines, electron beam exposure machines, etc., physical property control equipment, such as equipment to change the electro-optical properties of samples, etc., and physical property characterization equipment, such as atomic force microscope, probe Needle table, spectrometer, etc.

3. However, the functions of the above-mentioned single scientific research equipment are relatively simple. For example, the main function of the micro-nano processing equipment is to process the micro-nano structure of the sample, and it is impossible to directly observe and characterize the processed micro-nano structure. Good samples are taken out of the device for further characterization. On the other hand, physical property characterization equipment cannot perform nanofabrication of samples or control the physical properties of samples, and can only provide characterization of samples that have been processed or samples whose physical properties have been adjusted. In particular, the regulation of optical and electrical properties of a sample is often non-permanent, transient, and dynamically changes with the environment and time of the sample. Therefore, it is very important to perform in-situ real-time physical property control and physical property characterization of the sample, and it is the key to whether the change law of the transient physical phenomenon of the sample can be observed.

4. At present, the combination of scientific research equipment can solve some of the above problems, such as the combination of atomic force microscopy and Raman spectroscopy, which can simultaneously characterize the physical properties of the sample's morphology and Raman spectroscopy; atomic force microscopy and electrical testing The combination of the platform can realize the physical property characterization of the morphology and electrical transport characteristics of the sample at the same time. However, the effect of simple superposition and combination is not ideal, and it is still impossible to realize the micro-nano processing, physical property control and in-situ physical property characterization of the sample at the same time, which greatly limits the research on the basic physical properties of nanomaterials and the research and development of nanodevices. with manufacturing.

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