A MEMS micro-hot plate based on lateral composite dielectric film and its manufacturing method and technical realization elements

Technical implementation elements:

4. In view of the above technical problems, the present invention provides a mems micro-hot plate based on a transverse composite dielectric film and a manufacturing method thereof.

5. The purpose of the present invention is to provide a flat-type micro-hot plate with low lateral heat conduction loss, high power consumption efficiency of the micro-hot plate and low mechanical deformation caused by thermal stress, which satisfies the requirements such as low power consumption, low deformation, High stability and reliability requirements.

6. the technical scheme that the present invention solves the above-mentioned technical problem is as follows:

7. A mems micro-hot plate based on a transverse composite dielectric film, the micro-hot plate comprising a composite dielectric layer, a silicon-based substrate, an isolation support layer, a heating electrode, a signal electrode and a pad, and a back etching area;

8. The silicon-based substrate is a base for manufacturing a micro-hot plate;

9. The isolation support layer is located above the silicon-based substrate, used for insulation, reducing heat loss, and providing support for the electrode heating area and the signal measurement area;

10. The heating electrode is arranged above the isolation support layer, and the heating electrode generates a heating area to provide the required working temperature for the micro-hot plate;

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